US 11,786,942 B2
Mask glue removing apparatus, system and method
Sung Hyun Kim, Gyeonggi-do (KR); Seok Joo Kim, Gyeonggi-do (KR); Kyung Hyun Nam, Gyeonggi-do (KR); Jin Sick Shin, Gyeonggi-do (KR); Hoon Chae, Gyeonggi-do (KR); and Jung Jin Choi, Gyeonggi-do (KR)
Assigned to SK hynix Inc., Gyeonggi-do (KR)
Filed by SK hynix Inc., Gyeonggi-do (KR)
Filed on Nov. 2, 2020, as Appl. No. 17/86,675.
Claims priority of application No. 10-2020-0060959 (KR), filed on May 21, 2020.
Prior Publication US 2021/0362199 A1, Nov. 25, 2021
Int. Cl. B08B 3/02 (2006.01); B08B 5/02 (2006.01); G03F 1/82 (2012.01); B05B 1/14 (2006.01)
CPC B08B 3/02 (2013.01) [B05B 1/14 (2013.01); B08B 5/02 (2013.01); G03F 1/82 (2013.01); B08B 2203/02 (2013.01); B08B 2220/01 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A mask glue removing apparatus comprising:
a first plate including a plurality of nozzles configured to be adjusted at independent dispensing angles of each other and a head in which the plurality of nozzles are installed and configured to move the head close to a position corresponding to a region of a mask in which glue is present, adjust the dispensing angles so that the plurality of nozzles face the region in which the glue is present, and dispense a chemical liquid, rinse, and air through the plurality of nozzles to remove the glue; and
a second plate on which the mask is placed and configured to adjust a position of a main body thereof according to a removal process for the glue, the second plate including at least one clamp type deviation preventing guide which fixes the mask up and down, to adjust a slope of the mask.