US 11,786,745 B2
Plasma treatment apparatus
Hyunyoung Lee, Busan (KR); Jeonghae Choi, Busan (KR); and Yeonsuk Song, Busan (KR)
Assigned to FEAGLE CO., LTD, Yangsan-si (KR)
Appl. No. 16/322,104
Filed by FEAGLE CO., LTD, Yangsan-si (KR)
PCT Filed Aug. 2, 2016, PCT No. PCT/KR2016/008479
§ 371(c)(1), (2) Date Jan. 30, 2019,
PCT Pub. No. WO2018/026025, PCT Pub. Date Feb. 8, 2018.
Prior Publication US 2019/0184187 A1, Jun. 20, 2019
Int. Cl. H01J 37/32 (2006.01); A61N 1/44 (2006.01); B01D 53/66 (2006.01); B01D 39/20 (2006.01); A61N 1/04 (2006.01); A61N 1/08 (2006.01); B01D 53/04 (2006.01)
CPC A61N 1/44 (2013.01) [A61N 1/0408 (2013.01); A61N 1/08 (2013.01); B01D 39/20 (2013.01); B01D 53/04 (2013.01); B01D 53/66 (2013.01); H01J 37/32 (2013.01); H01J 37/3244 (2013.01); H01J 37/32568 (2013.01); H01J 37/32844 (2013.01); A61M 2202/0216 (2013.01); A61M 2205/054 (2013.01); A61M 2210/0606 (2013.01); B01D 2253/1124 (2013.01); B01D 2257/106 (2013.01); B01D 2259/4533 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A plasma treatment apparatus comprising:
a cover configured to be attached to a body part;
a plasma generation unit configured to generate plasma and provide the plasma to the cover;
a gas supply unit configured to supply a source gas for generating the plasma to the plasma generation unit;
an exhaust unit configured to exhaust an exhaust gas from the cover;
a by-product removal unit configured to remove a by-product from the exhaust gas;
a sensor unit configured to detect whether the body part is sealed by the cover; and
a controller configured to control the plasma generation unit, depending on whether the body part is sealed or not.