US 10,798,810 B2
Plasma source
Pascal Sortais, Meylan (FR)
Assigned to Polygon Physics, Meylan (FR)
Appl. No. 16/480,063
Filed by Polygon Physics, Meylan (FR)
PCT Filed Dec. 21, 2017, PCT No. PCT/FR2017/053798
§ 371(c)(1), (2) Date Jul. 23, 2019,
PCT Pub. No. WO2018/142036, PCT Pub. Date Aug. 9, 2018.
Claims priority of application No. 17 50978 (FR), filed on Feb. 6, 2017.
Prior Publication US 2019/0394866 A1, Dec. 26, 2019
Int. Cl. H05H 1/46 (2006.01); H01J 27/16 (2006.01)
CPC H05H 1/46 (2013.01) [H01J 27/16 (2013.01); H01J 2237/0817 (2013.01); H05H 2001/463 (2013.01); H05H 2001/466 (2013.01)] 8 Claims
OG exemplary drawing
1. A plasma source comprising a quarter wave antenna located in a cylindrical enclosure provided with an opening opposite the end of the antenna, wherein:
the diameter (d) of the antenna is in the range from one third to one quarter of the inner diameter (d1) of the enclosure,
the distance (l) between the end of the antenna and the opening is in the range from ⅔ to 5/3 of the diameter (d) of the antenna.