CPC H05G 2/008 (2013.01) [G01N 21/6402 (2013.01); H05G 2/006 (2013.01)] | 34 Claims |
1. A method comprising:
enabling an interaction between a diagnostic system and a current target traveling along a trajectory toward a target space, the current target including a component that emits light when converted to plasma;
detecting first light at a first detection region, wherein the first light comprises light emitted from the plasma produced by a previous target and light produced from the enabled interaction between the current target and the diagnostic system;
detecting second light at a second detection region, wherein the second light comprises the light emitted from the previous target's plasma;
producing an analysis signal based on a first signal produced by the detected first light and a second signal produced by the detected second light; and
estimating a property of the current target based on the produced analysis signal.
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