CPC H03H 9/1057 (2013.01) [B81B 7/0038 (2013.01); B81C 1/00285 (2013.01); H03H 3/0072 (2013.01); H03H 9/2457 (2013.01); B81B 2201/0271 (2013.01); B81C 2203/0118 (2013.01)] | 20 Claims |
1. A resonance device, comprising:
a first substrate including a resonator;
a second substrate; and
a bonding portion bonding the first substrate to the second substrate so as to seal a vibration space of the resonator,
wherein the bonding portion includes a eutectic layer composed of a eutectic alloy of germanium and a metal mainly containing aluminum, a first titanium layer, a first aluminum oxide film, and a first conductive layer consecutively arranged from the first substrate to the second substrate.
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