CPC H01L 33/483 (2013.01) [B32B 7/12 (2013.01); B32B 17/00 (2013.01); C03C 27/10 (2013.01); H01L 31/0203 (2013.01); H01L 31/18 (2013.01); B32B 2457/00 (2013.01); H01L 2933/0033 (2013.01)] | 5 Claims |
1. A method for manufacturing a synthetic quartz glass cavity member, comprising the steps of:
drilling a first synthetic quartz glass substrate at a plurality of positions to form a plurality of through-holes,
laying a second synthetic quartz glass substrate on the first synthetic quartz glass substrate to form a laminate, the second synthetic quartz glass substrate having a mirror surface which is opposed to the perforated synthetic quartz glass substrate, and
cutting the laminate at a position between adjacent through-holes into a plurality of discrete synthetic quartz glass cavity members.
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