US 11,757,067 B2
Synthetic quartz glass cavity member, synthetic quartz glass cavity lid, optical device package, and making methods
Harunobu Matsui, Joetsu (JP); Daijitsu Harada, Joetsu (JP); Daiyu Okafuji, Joetsu (JP); Hiroyuki Yamazaki, Joetsu (JP); and Masaki Takeuchi, Joetsu (JP)
Assigned to SHIN-ETSU CHEMICAL CO., LTD., Tokyo (JP)
Filed by Shin-Etsu Chemical Co., Ltd., Tokyo (JP)
Filed on Jul. 15, 2022, as Appl. No. 17/866,230.
Application 17/866,230 is a division of application No. 16/518,263, filed on Jul. 22, 2019, granted, now 11,424,389.
Claims priority of application No. 2018-137374 (JP), filed on Jul. 23, 2018.
Prior Publication US 2022/0352427 A1, Nov. 3, 2022
Int. Cl. H01L 33/48 (2010.01); B32B 7/12 (2006.01); B32B 17/00 (2006.01); C03C 27/10 (2006.01); H01L 31/0203 (2014.01); H01L 31/18 (2006.01)
CPC H01L 33/483 (2013.01) [B32B 7/12 (2013.01); B32B 17/00 (2013.01); C03C 27/10 (2013.01); H01L 31/0203 (2013.01); H01L 31/18 (2013.01); B32B 2457/00 (2013.01); H01L 2933/0033 (2013.01)] 5 Claims
OG exemplary drawing
 
1. A method for manufacturing a synthetic quartz glass cavity member, comprising the steps of:
drilling a first synthetic quartz glass substrate at a plurality of positions to form a plurality of through-holes,
laying a second synthetic quartz glass substrate on the first synthetic quartz glass substrate to form a laminate, the second synthetic quartz glass substrate having a mirror surface which is opposed to the perforated synthetic quartz glass substrate, and
cutting the laminate at a position between adjacent through-holes into a plurality of discrete synthetic quartz glass cavity members.