US 11,757,061 B2
Microelectronic workpiece processing systems and associated methods of color correction
Kevin Tetz, Boise, ID (US); and Charles M. Watkins, Eagle, ID (US)
Assigned to Micron Technology, Inc., Boise, ID (US)
Filed by Micron Technology, Inc., Boise, ID (US)
Filed on Jul. 12, 2021, as Appl. No. 17/373,200.
Application 16/434,956 is a division of application No. 14/269,348, filed on May 5, 2014, granted, now 10,319,875, issued on Jun. 11, 2019.
Application 14/269,348 is a division of application No. 12/715,820, filed on Mar. 2, 2010, granted, now 8,716,038, issued on May 6, 2014.
Application 17/373,200 is a continuation of application No. 16/434,956, filed on Jun. 7, 2019, granted, now 11,075,319.
Prior Publication US 2021/0343892 A1, Nov. 4, 2021
This patent is subject to a terminal disclaimer.
Int. Cl. H01L 33/00 (2010.01); B05C 11/00 (2006.01)
CPC H01L 33/005 (2013.01) [B05C 11/00 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A system for processing a semiconductor substrate, comprising:
a substrate support configured to carry a microelectronic workpiece comprising a plurality of light emitting diodes (LEDs);
a plurality of containers, each of the plurality of containers holding a different converter material;
a mixer operatively coupled to the plurality of containers, the mixer configured to regulate at least one of a concentration and a flow rate of the converter materials out of the plurality of containers;
an injector positioned to introduce one or more of the converter materials from the mixer onto the plurality of LEDs of the microelectronic workpiece; and
a controller operatively coupled to the mixer and the injector, the controller having a computer-readable storage medium containing instructions which, when executed, cause the controller to perform a method comprising:
measuring a base emission characteristic of each of the plurality of LEDs on the microelectronic workpiece;
developing an emission map of the plurality of LEDs based at least partially on the measured base emission characteristics; and
causing the injector to introduce the one or more of the converter materials onto each of the plurality of LEDs based on the emission map and a compensation scheme,
wherein the one or more of the converter materials introduced onto each of the plurality of LEDs include at least one converter material with a converter emission wavelength opposite a black body curve in a chromaticity plot from a LED emission wavelength of the corresponding one of the plurality of LEDs.