CPC H01L 31/02164 (2013.01) [G01J 1/0407 (2013.01); G02B 5/008 (2013.01); G02B 5/1866 (2013.01); H01L 27/1446 (2013.01); H01L 31/03046 (2013.01); H01L 31/035236 (2013.01); H01L 31/035281 (2013.01); H01L 31/1844 (2013.01); G01J 1/44 (2013.01); G01J 2001/446 (2013.01)] | 20 Claims |
1. A system comprising:
a substrate;
a detector array disposed over the substrate, the detector array comprising multiple detector pixels; and
multiple plasmonic gratings disposed over top surfaces of the detector pixels, each plasmonic grating comprising multiple convex polyhedrons separated by valleys, each convex polyhedron having a mesa shape with sloped sides such that a base of each convex polyhedron is larger than a top surface of that convex polyhedron.
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