US 11,757,050 B2
System and method for extending the practical cutoff wavelength of electro-optical/infrared (EO/IR) sensor using plasmonic resonators comprising convex polyhedrons and each convex polyhedron having a mesa shape with sloped sides
Jamal I. Mustafa, Goleta, CA (US)
Assigned to Raytheon Company, Waltham, MA (US)
Filed by Raytheon Company, Waltham, MA (US)
Filed on Nov. 17, 2020, as Appl. No. 16/950,618.
Prior Publication US 2022/0158002 A1, May 19, 2022
Int. Cl. H01L 31/0216 (2014.01); G01J 1/04 (2006.01); H01L 27/144 (2006.01); H01L 31/0304 (2006.01); H01L 31/0352 (2006.01); H01L 31/18 (2006.01); G02B 5/00 (2006.01); G02B 5/18 (2006.01); G01J 1/44 (2006.01)
CPC H01L 31/02164 (2013.01) [G01J 1/0407 (2013.01); G02B 5/008 (2013.01); G02B 5/1866 (2013.01); H01L 27/1446 (2013.01); H01L 31/03046 (2013.01); H01L 31/035236 (2013.01); H01L 31/035281 (2013.01); H01L 31/1844 (2013.01); G01J 1/44 (2013.01); G01J 2001/446 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A system comprising:
a substrate;
a detector array disposed over the substrate, the detector array comprising multiple detector pixels; and
multiple plasmonic gratings disposed over top surfaces of the detector pixels, each plasmonic grating comprising multiple convex polyhedrons separated by valleys, each convex polyhedron having a mesa shape with sloped sides such that a base of each convex polyhedron is larger than a top surface of that convex polyhedron.