US 11,756,982 B2
Methods of parallel transfer of micro-devices using mask layer
Manivannan Thothadri, Mountain View, CA (US); and Arvinder Chadha, San Jose, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Sep. 20, 2021, as Appl. No. 17/479,996.
Application 16/805,378 is a division of application No. 16/270,235, filed on Feb. 7, 2019, granted, now 10,580,826, issued on Mar. 3, 2020.
Application 16/270,235 is a division of application No. 15/619,226, filed on Jun. 9, 2017, granted, now 10,217,793, issued on Feb. 26, 2019.
Application 17/479,996 is a continuation in part of application No. 16/805,378, filed on Feb. 28, 2020, granted, now 11,127,781.
Claims priority of provisional application 62/348,691, filed on Jun. 10, 2016.
Prior Publication US 2022/0005864 A1, Jan. 6, 2022
Int. Cl. H01L 27/15 (2006.01); H01L 25/075 (2006.01); H01L 33/00 (2010.01); H01L 33/60 (2010.01); H05K 3/00 (2006.01); H05K 3/30 (2006.01); H05K 13/00 (2006.01); H05K 13/04 (2006.01); H01L 21/67 (2006.01); H01L 21/683 (2006.01); H01L 33/20 (2010.01); H01L 33/48 (2010.01)
CPC H01L 27/156 (2013.01) [H01L 21/67144 (2013.01); H01L 21/6835 (2013.01); H01L 25/0753 (2013.01); H01L 33/0095 (2013.01); H01L 33/60 (2013.01); H05K 3/0026 (2013.01); H05K 3/305 (2013.01); H05K 13/0015 (2013.01); H05K 13/0069 (2013.01); H05K 13/0469 (2013.01); H01L 33/20 (2013.01); H01L 33/48 (2013.01); H01L 2221/68322 (2013.01); H01L 2221/68368 (2013.01); H01L 2221/68381 (2013.01); H01L 2933/0033 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A method of transferring micro-devices, comprising:
attaching a plurality of micro-devices to a first surface of a first body with a first adhesive layer;
selectively forming a masking layer on a second surface of the first body on a side of the first body opposite the first surface;
while the plurality of micro-devices are attached to the first surface by the first adhesive layer, positioning a third surface of a second body relative to the first surface so that a second adhesive layer on the third surface abuts the plurality of micro-devices on a side of plurality of micro-devices opposite the first surface;
exposing the first adhesive layer to illumination through the first body to create a neutralized portion while the masking layer blocks the illumination from reaching at least some of first adhesive layer to provide a less exposed portion of the first adhesive layer that is more adhesive than the neutralized portion; and
separating the first surface from the second surface such that one or more micro-devices corresponding to the less exposed portion of the first adhesive layer remain attached to the first surface and one or more micro-devices corresponding to the neutralized portion are attached to the third surface and are separated from the first surface.