US 11,756,967 B2
Display device having etch stoppers with through holes
Eun Kyung Yeon, Suwon-si (KR); Jung Hun Noh, Yongin-si (KR); Yi Joon Ahn, Seoul (KR); and Jae Been Lee, Seoul (KR)
Assigned to SAMSUNG DISPLAY CO., LTD., Yongin-si (KR)
Filed by Samsung Display Co., LTD., Yongin-si (KR)
Filed on Oct. 1, 2020, as Appl. No. 17/60,630.
Claims priority of application No. 10-2020-0033223 (KR), filed on Mar. 18, 2020.
Prior Publication US 2021/0296373 A1, Sep. 23, 2021
Int. Cl. H01L 27/12 (2006.01); H01L 25/16 (2023.01); H10K 59/131 (2023.01)
CPC H01L 27/1262 (2013.01) [H01L 25/167 (2013.01); H10K 59/131 (2023.02)] 14 Claims
OG exemplary drawing
 
1. A display device comprising:
a first substrate having a display area and a non-display area adjacent to the display area, the first substrate comprising a substrate through-hole penetrating the first substrate in a thickness direction;
an etching stopper disposed on a first surface of the first substrate, the etching stopper comprising a stopper through-hole that overlaps the substrate through-hole and penetrates the etching stopper in the thickness direction;
a data line disposed on the etching stopper;
a substrate connection electrode that fills the substrate through-hole and the stopper through-hole, the substrate connection electrode being disposed in the display area and electrically connected to the data line; and
a first pad disposed on a second surface of the first substrate opposite to the first surface and overlapping the substrate connection electrode, wherein
the first pad is electrically connected to the substrate connection electrode,
the etching stopper comprises a first surface that is in contact with the first surface of the first substrate, and a second surface that is opposite to the first surface of the etching stopper, and
the substrate connection electrode comprises:
a first surace that is coplanar with the second surface of the etching stopper;
a second surface that is coplanar with the second surface of the first substrate, the second surface of the substrate connection electrode having a first width;
a side surface that is curved and that forms the substrate through-hole between the first surface of the first substrate and the second surface of the first substrate;
a second width between the first surface of the first substrate and the second surface of the first substrate, the second width of the substrate connection electrode less than the first width of the substrate connection electrode; and
a third width above the first surface of the first substrate, the third width of the substrate connection electrode greater than the second width of the substrate connection electrode.