US 11,756,847 B2
Method of manufacturing a glass article to provide increased bonding of metal to a glass substrate via the generation of a metal oxide layer, and glass articles such as glass interposers including the metal oxide layer
Kaveh Adib, Corning, NY (US); Philip Simon Brown, Big Flats, NY (US); Mandakini Kanungo, Ithaca, NY (US); Prantik Mazumder, Ithaca, NY (US); and Rajesh Vaddi, Horseheads, NY (US)
Assigned to Corning Incorporated, Corning, NY (US)
Filed by CORNING INCORPORATED, Corning, NY (US)
Filed on Jun. 22, 2022, as Appl. No. 17/846,320.
Application 17/846,320 is a division of application No. 17/217,027, filed on Mar. 30, 2021, granted, now 11,456,225.
Claims priority of provisional application 63/009,708, filed on Apr. 14, 2020.
Prior Publication US 2022/0399242 A1, Dec. 15, 2022
Int. Cl. H01L 23/15 (2006.01); C23C 26/00 (2006.01); H01L 21/48 (2006.01); H01L 23/498 (2006.01)
CPC H01L 23/15 (2013.01) [C23C 26/00 (2013.01); H01L 21/481 (2013.01); H01L 23/49827 (2013.01); H01L 23/49894 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A method of manufacturing a glass article comprising: forming a first layer of a catalyst metal on a surface of a glass substrate; subjecting the glass substrate with the first layer of the catalyst metal to a temperature of 150° C. to 600° C. for at least 2 minutes; forming a second layer of an alloy of a first metal and a second metal on the first layer; subjecting the glass substrate with the second layer of the alloy of the first metal and the second metal on the first layer of the catalyst metal to a temperature of 250° C. to 600° C. for at least 30 minutes, thereby forming the glass article comprising: (i) the glass substrate; (ii) an oxide of the first metal covalently bonded to the glass substrate; and (iii) a metallic region bonded to the oxide of the first metal, the metallic region comprising the catalyst metal in elemental form, the first metal in elemental form, and the second metal in elemental form; forming a third layer of a primary metal on the metallic region of the glass article; subjecting the glass article with the third layer of the primary metal to a temperature of 250° C. to 600° C. in an inert environment for at least 30 minutes thereby forming the glass article comprising: (i) the glass substrate; (ii) an oxide of the first metal covalently bonded to the glass substrate; and (iii) a new metallic region comprising the catalyst metal, the first metal in elemental form, the second metal in elemental form, and the primary metal in elemental form, wherein subjecting the glass substrate with the first layer of the catalyst metal to a temperature of 150° C. to 600° C. for at least 2 minutes comprises: subjecting the glass substrate with the first layer of the catalyst metal to a temperature of 325° C. to 375° C. for at least 2 minutes; subjecting the glass substrate with the second layer of the alloy of the first metal and the second metal on the first layer of the catalyst metal to a temperature of 250° C. to 600° C. for at least 30 minutes comprises: subjecting the glass substrate with the second layer of the alloy of the first metal and the second metal on the first layer of the catalyst metal to a temperature of 300° C. to 425° C. for at least 30 minutes; and subjecting the glass article with the third layer of the primary metal to a temperature of 250° C. to 600° C. in an inert environment for at least 30 minutes comprises: subjecting the glass article with the third layer of the primary metal to a temperature of 300° C. to 400° C. in an inert environment for at least 30 minutes.