CPC H01L 23/15 (2013.01) [C23C 26/00 (2013.01); H01L 21/481 (2013.01); H01L 23/49827 (2013.01); H01L 23/49894 (2013.01)] | 12 Claims |
1. A method of manufacturing a glass article comprising: forming a first layer of a catalyst metal on a surface of a glass substrate; subjecting the glass substrate with the first layer of the catalyst metal to a temperature of 150° C. to 600° C. for at least 2 minutes; forming a second layer of an alloy of a first metal and a second metal on the first layer; subjecting the glass substrate with the second layer of the alloy of the first metal and the second metal on the first layer of the catalyst metal to a temperature of 250° C. to 600° C. for at least 30 minutes, thereby forming the glass article comprising: (i) the glass substrate; (ii) an oxide of the first metal covalently bonded to the glass substrate; and (iii) a metallic region bonded to the oxide of the first metal, the metallic region comprising the catalyst metal in elemental form, the first metal in elemental form, and the second metal in elemental form; forming a third layer of a primary metal on the metallic region of the glass article; subjecting the glass article with the third layer of the primary metal to a temperature of 250° C. to 600° C. in an inert environment for at least 30 minutes thereby forming the glass article comprising: (i) the glass substrate; (ii) an oxide of the first metal covalently bonded to the glass substrate; and (iii) a new metallic region comprising the catalyst metal, the first metal in elemental form, the second metal in elemental form, and the primary metal in elemental form, wherein subjecting the glass substrate with the first layer of the catalyst metal to a temperature of 150° C. to 600° C. for at least 2 minutes comprises: subjecting the glass substrate with the first layer of the catalyst metal to a temperature of 325° C. to 375° C. for at least 2 minutes; subjecting the glass substrate with the second layer of the alloy of the first metal and the second metal on the first layer of the catalyst metal to a temperature of 250° C. to 600° C. for at least 30 minutes comprises: subjecting the glass substrate with the second layer of the alloy of the first metal and the second metal on the first layer of the catalyst metal to a temperature of 300° C. to 425° C. for at least 30 minutes; and subjecting the glass article with the third layer of the primary metal to a temperature of 250° C. to 600° C. in an inert environment for at least 30 minutes comprises: subjecting the glass article with the third layer of the primary metal to a temperature of 300° C. to 400° C. in an inert environment for at least 30 minutes.
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