US 11,756,816 B2
Carrier FOUP and a method of placing a carrier
Steven Trey Tindel, Austin, TX (US); Alexander N. Lerner, San Jose, CA (US); and Kim Ramkumar Vellore, San Jose, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Sep. 12, 2019, as Appl. No. 16/568,910.
Claims priority of provisional application 62/879,367, filed on Jul. 26, 2019.
Prior Publication US 2021/0028039 A1, Jan. 28, 2021
Int. Cl. H01L 21/68 (2006.01); H01L 21/673 (2006.01)
CPC H01L 21/67386 (2013.01) [H01L 21/67346 (2013.01); H01L 21/67363 (2013.01); H01L 21/67383 (2013.01); H01L 21/68 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A carrier front opening unified pod (FOUP), comprising:
a body, comprising:
a plurality of side walls, each side wall comprising a plurality of chamfers, defining a plurality of stacked carrier receiving slots, each slot configured to support a carrier;
a back wall, comprising a plurality of angular alignment features configured to align the carrier; and
a door coupled to the body, wherein the door comprises a first plurality of capture features horizontally offset from a second plurality of capture features, the first plurality of capture features aligned with every other carrier receiving slot, the second plurality of capture features aligned with every other carrier receiving slot, the first plurality of capture features align with different carrier receiving slots than the second plurality of capture features, the first and second plurality of capture features are configured to secure carriers within the carrier receiving slots when the door is closed.