CPC H01L 21/67386 (2013.01) [H01L 21/67346 (2013.01); H01L 21/67363 (2013.01); H01L 21/67383 (2013.01); H01L 21/68 (2013.01)] | 20 Claims |
1. A carrier front opening unified pod (FOUP), comprising:
a body, comprising:
a plurality of side walls, each side wall comprising a plurality of chamfers, defining a plurality of stacked carrier receiving slots, each slot configured to support a carrier;
a back wall, comprising a plurality of angular alignment features configured to align the carrier; and
a door coupled to the body, wherein the door comprises a first plurality of capture features horizontally offset from a second plurality of capture features, the first plurality of capture features aligned with every other carrier receiving slot, the second plurality of capture features aligned with every other carrier receiving slot, the first plurality of capture features align with different carrier receiving slots than the second plurality of capture features, the first and second plurality of capture features are configured to secure carriers within the carrier receiving slots when the door is closed.
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