US 11,756,814 B1
Vertical polishing system with multiple degrees of freedom
Sandeep Rekhi, San Jose, CA (US); and Pradip Sairam Pichumani, Bellevue, WA (US)
Assigned to META PLATFORMS, INC., Menlo Park, CA (US)
Filed by META PLATFORMS, INC., Menlo Park, CA (US)
Filed on May 27, 2021, as Appl. No. 17/332,794.
Int. Cl. B24B 37/00 (2012.01); H01L 21/67 (2006.01); B24B 37/34 (2012.01); B24B 37/24 (2012.01)
CPC H01L 21/67219 (2013.01) [B24B 37/245 (2013.01); B24B 37/34 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A system, comprising:
a motor;
a polishing pad holder that is actuated by the motor, wherein the polishing pad holder comprises a surface to hold a grinding or polishing pad; and
a sample holder to hold a sample to be polished by the grinding or polishing pad attached to the surface of the polishing pad holder, wherein the sample holder comprises:
a mounting surface component to hold the sample, wherein the mounting surface component is extendible or retractable to move the sample toward or away from the polishing pad holder,
a first U-shaped component attached to an outside wall of the mounting surface component and rotatable around a first axis, perpendicular to the surface of the polishing pad holder, to allow the mounting surface component to rotate on the surface of the polishing pad holder,
a second U-shaped component attached to an outside wall of the first U-shaped component and rotatable around a second axis, perpendicular to the first axis, to allow the mounting surface component to tilt up or down with respect to the surface of the polishing pad holder, and
a third U-shaped component attached to an outside wall of the second U-shaped component and rotatable around a third axis, perpendicular to the first axis and the second axis, to allow the mounting surface component to tilt left or right with respect to the surface of the polishing pad holder.