CPC B08B 1/04 (2013.01) [B08B 3/003 (2013.01); B24B 37/27 (2013.01); B24B 37/34 (2013.01); H01L 21/6704 (2013.01); B24B 37/12 (2013.01); B24B 55/04 (2013.01); B24B 57/00 (2013.01); H01L 21/304 (2013.01); H01L 21/30625 (2013.01)] | 14 Claims |
1. An assembly comprising:
a rotatable platen;
a platen shield surrounding the rotatable platen and separated from the rotatable platen by a gap;
an adapter configured to be removably secured to the rotatable platen;
a sponge holder attached to the adapter and situated in the gap; and
a sponge held by the sponge holder such that an outer surface of the sponge is pressed by the adapter against an inner surface of the platen shield.
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