US 11,756,804 B2
Platen shield cleaning system
Shantanu Rajiv Gadgil, Santa Clara, CA (US); Sumit Subhash Patankar, Fremont, CA (US); Nathan Arron Davis, Gilbert, AZ (US); and Allen L. D'Ambra, Burlingame, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Dec. 29, 2022, as Appl. No. 18/91,309.
Application 18/091,309 is a division of application No. 16/909,947, filed on Jun. 23, 2020, granted, now 11,545,371.
Prior Publication US 2023/0146929 A1, May 11, 2023
Int. Cl. B08B 1/04 (2006.01); B24B 37/34 (2012.01); H01L 21/67 (2006.01); B24B 37/27 (2012.01); B08B 3/00 (2006.01); B24B 37/12 (2012.01); B24B 57/00 (2006.01); H01L 21/306 (2006.01); B24B 55/04 (2006.01); H01L 21/304 (2006.01)
CPC B08B 1/04 (2013.01) [B08B 3/003 (2013.01); B24B 37/27 (2013.01); B24B 37/34 (2013.01); H01L 21/6704 (2013.01); B24B 37/12 (2013.01); B24B 55/04 (2013.01); B24B 57/00 (2013.01); H01L 21/304 (2013.01); H01L 21/30625 (2013.01)] 14 Claims
OG exemplary drawing
 
1. An assembly comprising:
a rotatable platen;
a platen shield surrounding the rotatable platen and separated from the rotatable platen by a gap;
an adapter configured to be removably secured to the rotatable platen;
a sponge holder attached to the adapter and situated in the gap; and
a sponge held by the sponge holder such that an outer surface of the sponge is pressed by the adapter against an inner surface of the platen shield.