US 11,756,763 B2
Scanning electron microscope
Teruo Kohashi, Tokyo (JP); Hideo Morishita, Tokyo (JP); and Junichi Katane, Tokyo (JP)
Assigned to HITACHI HIGH-TECH CORPORATION, Tokyo (JP)
Appl. No. 17/616,253
Filed by Hitachi High-Tech Corporation, Tokyo (JP)
PCT Filed Jun. 6, 2019, PCT No. PCT/JP2019/022452
§ 371(c)(1), (2) Date Dec. 3, 2021,
PCT Pub. No. WO2020/245962, PCT Pub. Date Dec. 10, 2020.
Prior Publication US 2022/0246393 A1, Aug. 4, 2022
Int. Cl. H01J 37/244 (2006.01); G01N 23/2251 (2018.01); H01J 37/28 (2006.01)
CPC H01J 37/244 (2013.01) [G01N 23/2251 (2013.01); H01J 37/28 (2013.01); H01J 2237/2448 (2013.01); H01J 2237/24585 (2013.01); H01J 2237/2806 (2013.01); H01J 2237/2813 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A scanning electron microscope for evaluating a strain in a sample, the scanning electron microscope comprising:
a spin detector configured to measure secondary electron spin polarization of secondary electrons emitted from the sample; and
an analysis device configured to analyze secondary electron spin polarization data measured by the spin detector, wherein
the analysis device evaluates the strain in the sample by calculating a difference in the secondary electron spin polarization data of adjacent pixels.