CPC G06T 7/001 (2013.01) [G06T 7/60 (2013.01); G06T 2207/10061 (2013.01); G06T 2207/30148 (2013.01); G06T 2207/30168 (2013.01); H01L 22/12 (2013.01)] | 20 Claims |
1. A metrology guidance system comprising:
a memory storing a set of instructions; and
one or more processors configured to execute the set of instructions to cause the metrology guidance system to:
determine a set of one or more image parameters based on an analysis of an acquired image;
determine a set of one or more model parameters based on the set of one or more image parameters;
generate a set of one or more simulated images based on the set of one or more model parameters;
analyze the set of one or more simulated images; and
output a set of one or more guidance parameters based on an analysis of the set of one or more simulated images and the set of one or more model parameters.
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