US 11,754,918 B2
Pellicle and pellicle assembly
David Ferdinand Vles, Eindhoven (NL); Chaitanya Krishna Ande, Eindhoven (NL); Antonius Franciscus Johannes De Groot, Someren (NL); Adrianus Johannes Maria Giesbers, Vlijmen (NL); Johannes Joseph Janssen, Beesel (NL); Paul Janssen, Eindhoven (NL); Johan Hendrik Klootwijk, Eindhoven (NL); Peter Simon Antonius Knapen, Deurne (NL); Evgenia Kurganova, Nijmegen (NL); Marcel Peter Meijer, Eindhoven (NL); Wouter Rogier Meijerink, Eindhoven (NL); Maxim Aleksandrovich Nasalevich, Eindhoven (NL); Arnoud Willem Notenboom, Rosmalen (NL); Raymond Olsman, Bennekom (NL); Hrishikesh Patel, Eindhoven (NL); Mária Péter, Eindhoven (NL); Gerrit Van Den Bosch, Geldermalsen (NL); Wilhelmus Theodorus Anthonius Johannes Van Den Einden, Deurne (NL); Willem Joan Van Der Zande, Bussum (NL); Pieter-Jan Van Zwol, Eindhoven (NL); Johannes Petrus Martinus Bernardus Vermeulen, Leende (NL); Willem-Pieter Voorthuijzen, 's-Hertogenbosch (NL); Hendrikus Jan Wondergem, Veldhoven (NL); and Aleksandar Nikolov Zdravkov, Eindhoven (NL)
Assigned to ASML NETHERLANDS B.V., Veldhoven (NL)
Filed by ASML NETHERLANDS B.V., Veldhoven (NL)
Filed on Dec. 13, 2021, as Appl. No. 17/548,944.
Application 17/548,944 is a continuation of application No. 16/614,815, granted, now 11,231,646, previously published as PCT/EP2018/065127, filed on Jun. 8, 2018.
Claims priority of application No. 17176205 (EP), filed on Jun. 15, 2017; and application No. 17190503 (EP), filed on Sep. 12, 2017.
Prior Publication US 2022/0121111 A1, Apr. 21, 2022
Int. Cl. G03F 1/64 (2012.01)
CPC G03F 1/64 (2013.01) 24 Claims
 
1. A pellicle assembly comprising:
a pellicle frame defining a surface onto which a pellicle is attached, the pellicle frame supporting the pellicle around an outer perimeter portion of the pellicle,
wherein the pellicle frame is bonded to the pellicle, and
wherein the pellicle is constructed from molybdenum disilicide (MoSi2).