CPC G03F 1/64 (2013.01) | 24 Claims |
1. A pellicle assembly comprising:
a pellicle frame defining a surface onto which a pellicle is attached, the pellicle frame supporting the pellicle around an outer perimeter portion of the pellicle,
wherein the pellicle frame is bonded to the pellicle, and
wherein the pellicle is constructed from molybdenum disilicide (MoSi2).
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