CPC G01R 29/24 (2013.01) [G01N 27/4145 (2013.01)] | 13 Claims |
1. A charge detection sensor, comprising:
a detection element on a first surface of a semiconductor substrate, wherein the detection element is configured to detect a charge;
a detection electrode on a second surface of the semiconductor substrate, wherein
the first surface is different from the second surface; and
a contact that penetrates the semiconductor substrate, wherein
the contact is configured to electrically connect the detection electrode and the detection element, and
the contact is directly connected to a terminal of the detection element.
|