US 11,754,353 B2
Processing water supply system
Tadaomi Matsumoto, Tokyo (JP); and Masaru Saito, Tokyo (JP)
Assigned to DISCO CORPORATION, Tokyo (JP)
Filed by DISCO CORPORATION, Tokyo (JP)
Filed on May 18, 2021, as Appl. No. 17/323,303.
Claims priority of application No. 2020-097018 (JP), filed on Jun. 3, 2020.
Prior Publication US 2021/0381783 A1, Dec. 9, 2021
Int. Cl. F28F 27/02 (2006.01); F28F 17/00 (2006.01)
CPC F28F 27/02 (2013.01) [F28F 17/00 (2013.01); F28F 2265/22 (2013.01)] 3 Claims
OG exemplary drawing
 
1. A processing water supply system for supplying processing water to a processing apparatus, the processing water supply system comprising:
a first heat exchanger that cools the processing water by heat of vaporization of a cooling medium;
a compressor which compresses the cooling medium;
a second heat exchanger that cools the cooling medium;
a cooling water receiving route that is connected to the second heat exchanger and receives cooling water from cooling water supply equipment to the second heat exchanger;
a cooling water drain route that is connected to the second heat exchanger and discharges the cooling water heat-exchanged in the second heat exchanger to drain equipment;
a bypass route that is disposed between the cooling water receiving route and the cooling water drain route, wherein the bypass route supplies a portion of the cooling water to the cooling water drain route without passing through the second heat exchanger when the cooling water heat-exchanged in the second heat exchanger exceeds a preset temperature, wherein a remainder of the cooling water flows through the second heat exchanger; and
a flow rate adjusting valve disposed between an inlet and an outlet of the bypass route, wherein the flow rate adjusting valve adjusts the flow rate of the cooling water through the bypass route.