US 11,753,726 B2
Protection of components from corrosion
David Britz, Los Gatos, CA (US); Pravin K. Narwankar, Sunnyvale, CA (US); David Thompson, San Jose, CA (US); Yuriy Melnik, San Jose, CA (US); and Sukti Chatterjee, San Jose, CA (US)
Assigned to APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on May 6, 2021, as Appl. No. 17/313,858.
Application 17/313,858 is a division of application No. 16/283,567, filed on Feb. 22, 2019, granted, now 11,015,252.
Claims priority of provisional application 62/726,795, filed on Sep. 4, 2018.
Claims priority of provisional application 62/663,633, filed on Apr. 27, 2018.
Prior Publication US 2021/0262099 A1, Aug. 26, 2021
This patent is subject to a terminal disclaimer.
Int. Cl. F01D 5/28 (2006.01); C23C 28/00 (2006.01); F01D 5/18 (2006.01); C23C 16/455 (2006.01); C23C 16/52 (2006.01); C23C 28/04 (2006.01); C23C 16/40 (2006.01); C23C 14/08 (2006.01)
CPC C23C 28/3455 (2013.01) [C23C 16/45525 (2013.01); C23C 16/52 (2013.01); C23C 28/3215 (2013.01); C23C 28/345 (2013.01); F01D 5/186 (2013.01); F01D 5/288 (2013.01); C23C 14/083 (2013.01); C23C 16/40 (2013.01); C23C 28/042 (2013.01); F05D 2230/31 (2013.01); F05D 2240/24 (2013.01); F05D 2260/95 (2013.01); F05D 2300/121 (2013.01); F05D 2300/132 (2013.01); F05D 2300/134 (2013.01); Y10T 428/2462 (2015.01)] 20 Claims
OG exemplary drawing
 
1. A multilayered coating structure, comprising:
a thermal barrier coating (TBC) layer disposed on a superalloy structure;
a metal oxide layer disposed on the TBC layer via atomic layer deposition (ALD) and comprising at least one of a rare earth metal, aluminum, zirconium, chromium, or combinations thereof, wherein the metal oxide layer has a thickness of about 1 nm to about 3 microns and has a variation in thickness of +/−50%;
a toughness enhancing layer in direct contact with the TBC layer;
a damage sensing layer in direct contact with the toughness enhancing layer, wherein the damage sensing layer comprises doped yttrium aluminum garnet (YAG) or doped yttria-stabilized zirconia (YSZ); and
an infrared (IR) reflector layer in direct contact with the damage sensing layer.
 
19. A multilayered coating structure, comprising:
a thermal barrier coating (TBC) layer disposed on a superalloy structure;
a metal oxide layer disposed on the TBC layer via atomic layer deposition (ALD) and comprising at least one of a rare earth metal, aluminum, zirconium, chromium, or combinations thereof, wherein the metal oxide layer has a thickness of about 1 nm to about 3 microns and has a variation in thickness of +/−50%;
a toughness enhancing layer in direct contact with the TBC layer, wherein the toughness enhancing layer has a thickness of about 5 microns to about 50 microns; and
a damage sensing layer in direct contact with the toughness enhancing layer, wherein the damage sensing layer comprises doped yttrium aluminum garnet (YAG) or doped yttria-stabilized zirconia (YSZ).