CPC C23C 16/45531 (2013.01) [B81B 3/00 (2013.01); B81B 3/0075 (2013.01); C04B 28/06 (2013.01); C23C 16/401 (2013.01); C23C 16/402 (2013.01); C23C 16/403 (2013.01); C23C 16/4417 (2013.01); C23C 16/45555 (2013.01); B32B 1/08 (2013.01); C04B 2111/00551 (2013.01); C04B 2235/3231 (2013.01); Y10T 428/265 (2015.01)] | 19 Claims |
1. An article comprising a ceramic substrate and a crystalline conformal film less than 15 nanometers thick on a surface of the ceramic substrate, the conformal film formed from alumina and silicon dioxide in an approximate ratio of 3 Al2O3 to 2 SiO2, wherein the conformal film encapsulates the substrate.
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