CPC C03C 3/087 (2013.01) [B32B 7/06 (2013.01); B32B 17/06 (2013.01); H01L 21/6835 (2013.01); H01L 21/7813 (2013.01); B32B 2250/02 (2013.01); B32B 2250/03 (2013.01); B32B 2457/14 (2013.01); C03C 3/091 (2013.01); H01L 2221/68318 (2013.01)] | 20 Claims |
1. A glass substrate comprising, as a glass matrix composition as represented by mole percentage based on oxides:
from 58% to 75% of SiO2,
from 4.5% to 7% of Al2O3,
from 0% to 6% of MgO,
from 0% to 6% of CaO,
from 5% to 20% of SrO,
from 9% to 20% of BaO, and
from 15% to 40% of MgO+CaO+SrO+BaO,
having an alkali metal oxide content of from 0% to 0.1% as represented by mole percentage based on oxides, and
having an average coefficient of thermal expansion α of from 56×10−7/° C. to 90×10−7/° C. at a temperature of from 50° C. to 350° C.,
wherein the glass matrix composition does not contain B2O3 and CeO2, and
wherein the glass substrate has a weight loss per unit area of 3 mg/cm2 or less, through 20-hour immersion in NaOH solution having a temperature of 90° C. and a concentration of 0.1 N.
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