US 11,752,686 B2
Imprint apparatus and method of controlling imprint apparatus
Hisashi Namba, Utsunomiya (JP); Noriyasu Hasegawa, Utsunomiya (JP); Yoshimasa Araki, Yokohama (JP); and Keita Sakai, Utsunomiya (JP)
Assigned to CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Sep. 4, 2020, as Appl. No. 17/12,287.
Claims priority of application No. 2019-165638 (JP), filed on Sep. 11, 2019.
Prior Publication US 2021/0069960 A1, Mar. 11, 2021
Int. Cl. B29C 59/00 (2006.01); B29C 59/02 (2006.01); B29C 37/00 (2006.01); B29L 31/34 (2006.01)
CPC B29C 59/002 (2013.01) [B29C 37/00 (2013.01); B29C 59/026 (2013.01); B29C 2037/90 (2013.01); B29L 2031/34 (2013.01)] 13 Claims
OG exemplary drawing
 
1. An imprint apparatus, including:
a movable housing unit;
an ejection head provided in the housing unit and configured to eject an ejection material;
a flexible member provided in the housing unit and separating the housing unit into a first storing space communicating with the ejection head and storing the ejection material and a second storing space storing hydraulic liquid;
a plurality of channels communicating with the second storing space, the plurality of channels including a first channel provided with a pump and a second channel;
a pressure control unit configured to control a pressure in the second storing space through the plurality of channels; and
a detection unit provided at the second storing space and configured to detect the pressure in the second storing space;
wherein the apparatus is configured such that in a case where the pressure detected by the detection unit is not within a predetermined range, the pump circulates the hydraulic liquid through the plurality of channels, and in a case where the pressure detected by the detection unit is within the predetermined range, the housing unit is moved to an ejection position at which the ejection material is to be ejected.