CPC B23K 26/362 (2013.01) [B23K 26/0604 (2013.01); B23K 26/067 (2013.01); B23K 26/0622 (2015.10); B23K 26/0626 (2013.01); B23K 26/0643 (2013.01); B23K 26/0648 (2013.01); B23K 26/0652 (2013.01); B23K 26/0665 (2013.01); B23K 26/073 (2013.01); G02B 19/0009 (2013.01); G02B 27/1093 (2013.01); G02B 27/283 (2013.01)] | 20 Claims |
1. A laser apparatus, comprising:
a laser generator generating at least one input light, wherein the input light is a laser beam;
an optical system converting the input light, which is provided from the laser generator, into an output light including a plurality of pattern lights; and
a stage, on which a target object is loaded, the output light being irradiated onto the target object,
wherein the optical system includes a light dividing part, a light condensing part, and a first processing part disposed on a focal point of the light condensing part and divides the input light into a plurality of divided lights having at least partially different phases,
the pattern lights are produced by constructive interference of the plurality of divided lights, and
a diameter of each of the pattern lights is smaller than a diameter of the input light.
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