CPC B05B 12/04 (2013.01) [B05B 7/00 (2013.01)] | 14 Claims |
1. A coating apparatus comprising:
a plurality of substrate holders arranged in a left-right direction and each configured to hold a substrate;
a first nozzle provided for each of the plurality of substrate holders and configured to discharge a first processing liquid to the substrate at a first discharge position on the substrate held by each of the plurality of substrate holders;
a second nozzle provided to be shared by the plurality of substrate holders and configured to move independently of the first nozzle and discharge a second processing liquid for forming a coating film to the substrate at a second discharge position on the substrate held by each of the plurality of substrate holders;
a third nozzle provided for each of the plurality of substrate holders and configured to move independently of the first nozzle and the second nozzle and discharge a third processing liquid to the substrate at a third discharge position on the substrate held by each of the plurality of substrate holders; a first arm supporting the first nozzle and configured to be turned such that the first nozzle is moved in a plan view between a first standby area, which is outside a region in which the substrate is held by each of the plurality of substrate holders in a plan view, and the first discharge position;
a shared arm supporting the second nozzle and configured to be rotated such that the second nozzle is moved in a plan view between a second standby area, which is outside the region in which the substrate is held by each of the plurality of substrate holders in a plan view, and the second discharge position;
a first linear mover configured to move the shared arm in the left-right direction; and
a second linear mover configured to linearly move the third nozzle in a plan view between a third standby area, which is outside the region in which the substrate is held by each of the plurality of substrate holders in a plan view, and the third discharge position.
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