US 11,751,479 B2
Method for controlling piezoelectric driving apparatus, piezoelectric driving apparatus, and robot
Hidetoshi Saito, Fujimi-machi (JP)
Assigned to SEIKO EPSON CORPORATION, Tokyo (JP)
Filed by SEIKO EPSON CORPORATION, Tokyo (JP)
Filed on Dec. 18, 2020, as Appl. No. 17/126,048.
Claims priority of application No. 2019-230206 (JP), filed on Dec. 20, 2019.
Prior Publication US 2021/0193902 A1, Jun. 24, 2021
Int. Cl. H02N 2/00 (2006.01); H10N 30/20 (2023.01); B25J 9/12 (2006.01); H10N 30/80 (2023.01)
CPC H10N 30/2023 (2023.02) [B25J 9/123 (2013.01); H10N 30/802 (2023.02)] 6 Claims
OG exemplary drawing
 
1. A method for controlling a piezoelectric driving apparatus including a piezoelectric vibrator,
the piezoelectric vibrator having a first frequency region where a phase difference between a pickup signal representing vibration of the piezoelectric vibrator and a drive signal that drives the piezoelectric vibrator does not monotonously change in accordance with a frequency of the drive signal and a second frequency region where the phase difference monotonously changes in accordance with the frequency of the drive signal,
the method comprising:
controlling the frequency of the drive signal in such a way that pickup voltage representing an amplitude of the pickup signal is fixed in the first frequency region; and
controlling the frequency of the drive signal in such a way the pickup voltage is fixed with the phase difference maintained smaller than or equal to a prespecified value in the second frequency region.