CPC H10K 71/00 (2023.02) [C23C 14/042 (2013.01); C23C 16/042 (2013.01); H10K 71/166 (2023.02)] | 11 Claims |
1. A mask frame assembly comprising:
a frame of a rectangular shape, the frame including an opening and a lower surface, the lower surface including first grooves defined in the lower surface and extending in a first direction;
a plurality of first auxiliary sticks extending in the first direction across the opening, wherein a first end and a second end of each of the first auxiliary sticks are bonded to an upper surface of the frame;
a mask disposed over the plurality of first auxiliary sticks; and
a plurality of second auxiliary sticks disposed in the first grooves, wherein a third end and a fourth end of each of the plurality of second auxiliary sticks are bonded to a bottom surface of the first grooves,
wherein the number of the plurality of first auxiliary sticks is greater than the number of the plurality of second auxiliary sticks, and a thickness of each of the plurality of second auxiliary sticks is greater than a thickness of each of the plurality of first auxiliary sticks,
wherein the frame has second grooves defined in the lower surface thereof, the second grooves extending in a second direction that crosses the first direction, and
the mask frame assembly further comprising: a plurality of third auxiliary sticks extending in the second direction across the opening, wherein a fifth end and a sixth end of each of the third auxiliary sticks are bonded to the upper surface of the frame; and
a plurality of fourth auxiliary sticks in the second grooves, wherein a seventh end and an eighth end of each of the plurality of fourth auxiliary sticks are bonded to a bottom surface of the second grooves,
wherein the plurality of first auxiliary sticks and the plurality of third auxiliary sticks are bonded to each other at intersecting points therebetween.
|