US 11,751,287 B2
Substrate heating device
Masatoshi Onoda, Shiga (JP); Ryosuke Goto, Shiga (JP); Kazuo Shimizu, Hyogo (JP); and Yasuhiro Kishimoto, Hyogo (JP)
Assigned to NISSIN ION EQUIPMENT CO., LTD., Koka (JP); and HIMEJI RIKA CO., LTD., Himeji (JP)
Filed by NISSIN ION EQUIPMENT CO., LTD., Koka (JP); and HIMEJI RIKA CO., LTD., Hyogo Prefecture (JP)
Filed on Jun. 4, 2020, as Appl. No. 16/892,552.
Claims priority of application No. 2019-121169 (JP), filed on Jun. 28, 2019.
Prior Publication US 2020/0413493 A1, Dec. 31, 2020
Int. Cl. H05B 1/02 (2006.01); H01L 21/67 (2006.01)
CPC H05B 1/0233 (2013.01) [H01L 21/67109 (2013.01); H01L 21/67115 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A substrate heating device comprising:
a vacuum chamber that receives a substrate; and
a heater comprising:
a body that penetrates through a wall of the vacuum chamber such that a portion of the body is in a vacuum atmosphere of the vacuum chamber, the body including a plurality of protrusions that protrude inwardly from an inner peripheral surface of a portion of the body that penetrates through the wall;
a heating wire provided inside the body and partly disposed inside the vacuum chamber;
a support member provided inside the body and attached to the heating wire, the support member being supported by each of the plurality of protrusions, wherein the support member and the plurality of protrusions are discrete;
a terminal part to which the heating wire is connected, the terminal part being disposed outside the vacuum chamber; and
a light leakage suppressing member that is provided inside the body and that blocks light rays emitted from the heating wire,
wherein the body is disposed to penetrate through a through-hole formed in the wall, and provided with a sealing member around an outer peripheral surface thereof, and
wherein the heating wire is configured such that an amount of heat generated by the heating wire at a first portion of the body penetrating through the through-hole is less than that at a second portion of the body disposed inside the vacuum chamber,
wherein the heating wire is configured such that an electrical resistance of the first portion is less than that of the second portion, and
wherein the light leakage suppressing member is supported by the plurality of protrusions.