US 11,750,973 B2
Microelectromechanical system
Anup Patel, Eb (GB); Euan James Boyd, Eb (GB); and Scott Lyall Cargill, Eb (GB)
Assigned to AAC Acoustic Technologies (Shenzhen) Co., Ltd., Shenzhen (CN)
Filed by AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD., Shenzhen (CN)
Filed on Feb. 5, 2021, as Appl. No. 17/168,192.
Prior Publication US 2022/0256284 A1, Aug. 11, 2022
Int. Cl. H04R 25/00 (2006.01); H04R 3/02 (2006.01); B81B 3/00 (2006.01)
CPC H04R 3/02 (2013.01) [B81B 3/0021 (2013.01); B81B 2201/0257 (2013.01); B81B 2203/019 (2013.01); B81B 2203/0118 (2013.01); B81B 2203/0127 (2013.01); B81B 2203/0315 (2013.01); H04R 2201/003 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A microelectromechanical system comprising:
an enclosure defining a cavity and an opening communicating with the cavity;
a membrane mounted at the opening;
at least one cantilever located within the cavity, the at least one cantilever comprising a first end, a second end and a fulcrum located between the first end and the second end;
a plunger positioned between the membrane and the at least one cantilever and configured to transfer displacement of the membrane to the first end of the at least one cantilever; and
a sensing member connected to the second end of the at least one cantilever;
wherein a distance between the first end and the fulcrum is less than that between the second end and the fulcrum;
the sensing member comprises a stationary part fixed with respect to the enclosure and a moveable part connected to the second end of the at least one cantilever and be moveable relative to the stationary part.