CPC H04R 3/02 (2013.01) [B81B 3/0021 (2013.01); B81B 2201/0257 (2013.01); B81B 2203/019 (2013.01); B81B 2203/0118 (2013.01); B81B 2203/0127 (2013.01); B81B 2203/0315 (2013.01); H04R 2201/003 (2013.01)] | 14 Claims |
1. A microelectromechanical system comprising:
an enclosure defining a cavity and an opening communicating with the cavity;
a membrane mounted at the opening;
at least one cantilever located within the cavity, the at least one cantilever comprising a first end, a second end and a fulcrum located between the first end and the second end;
a plunger positioned between the membrane and the at least one cantilever and configured to transfer displacement of the membrane to the first end of the at least one cantilever; and
a sensing member connected to the second end of the at least one cantilever;
wherein a distance between the first end and the fulcrum is less than that between the second end and the fulcrum;
the sensing member comprises a stationary part fixed with respect to the enclosure and a moveable part connected to the second end of the at least one cantilever and be moveable relative to the stationary part.
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