CPC H03H 9/02566 (2013.01) [H03H 9/02559 (2013.01); H03H 9/02574 (2013.01); H03H 9/14564 (2013.01); H03H 9/6433 (2013.01)] | 22 Claims |
1. A guided surface acoustic wave (SAW) device comprising:
a silicon substrate having a crystalline orientation defined by a first Euler angle (ϕ), a second Euler angle (θ), and a third Euler angle (ψ), wherein the first Euler angle (ϕ), the second Euler angle (θ), and the third Euler angle (ψ) such that a velocity of wave propagation within the substrate is less than 6,000 m/s;
a piezoelectric layer on the silicon substrate; and
a transducer on the piezoelectric layer.
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