US 11,749,964 B2
Monolithic light source with integrated optics based on nonlinear frequency conversion
Maik Andre Scheller, Redmond, WA (US); and Anurag Tyagi, Kirkland, WA (US)
Assigned to Meta Platforms Technologies, LLC, Menlo Park, CA (US)
Filed by Meta Platforms Technologies, LLC, Menlo Park, CA (US)
Filed on Jun. 24, 2020, as Appl. No. 16/911,294.
Prior Publication US 2021/0408761 A1, Dec. 30, 2021
Int. Cl. H01S 5/00 (2006.01); H01S 5/06 (2006.01); H01S 5/065 (2006.01); H01S 5/14 (2006.01); H01S 5/42 (2006.01); H01S 5/20 (2006.01); H01S 5/183 (2006.01); H01S 5/34 (2006.01)
CPC H01S 5/0604 (2013.01) [H01S 5/0657 (2013.01); H01S 5/141 (2013.01); H01S 5/1833 (2013.01); H01S 5/18311 (2013.01); H01S 5/18333 (2013.01); H01S 5/18336 (2013.01); H01S 5/2086 (2013.01); H01S 5/423 (2013.01); H01S 5/14 (2013.01); H01S 5/18388 (2013.01); H01S 5/34 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A semiconductor light source comprising:
a substrate; a resonant cavity including a first mirror and a second mirror, the first mirror and the second mirror each including a respective set of semiconductor layers, wherein the resonant cavity is on the substrate; a semiconductor light emitting region in the resonant cavity and configured to emit infrared light; a third mirror between the resonant cavity and the substrate, having an area larger than the second mirror;
a planar lens including a plurality of semiconductor layers and configured to focus the infrared light emitted from the semiconductor light emitting, wherein the planar lens is between the first mirror and the second mirror;
a nonlinear crystal configured to convert the infrared light focused by the planar lens into visible light through second harmonic generation, wherein the planar lens and the nonlinear crystal are positioned such that the planar lens focuses the infrared light emitted from the semiconductor light emitting region into an area of the nonlinear crystal to increase a light intensity at the area of the nonlinear crystal; and
a selective reflection layer on the nonlinear crystal and configured to:
reflect the infrared light back into the resonant cavity to form an external cavity; and
transmit the visible light out of the semiconductor light source.