CPC H01L 27/14676 (2013.01) [G01N 23/046 (2013.01); G01T 1/24 (2013.01); G01T 1/2018 (2013.01)] | 20 Claims |
1. A detection layer of a radiation detector, comprising:
a porous silicon membrane, including:
a first side and a second opposing side;
a plurality of pores extending entirely through the porous silicon membrane from the first side to the second opposing side, each including shared walls;
at least one protrusion of silicon protruding out and extending, from the wall on the first side, a distance;
a plurality of radiation sensitive quantum dots in the pores; and
a quantum dot layer disposed on the first side and having a surface and a thickness, wherein the thickness is greater than the distance.
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