US 11,749,706 B2
Quantum dot porous silicon membrane-based radiation detector
Marc Anthony Chappo, Elyria, OH (US); and Stephanie Lee Brock, Ferndale, MI (US)
Assigned to KONINKLIJKE PHILIPS N.V., Eindhoven (NL); and WAYNE STATE UNIVERSITY, Detroit, MI (US)
Appl. No. 17/439,440
Filed by KONINKLIJKE PHILIPS N.V., Eindhoven (NL); and WAYNE STATE UNIVERSITY, Detriot, MI (US)
PCT Filed Mar. 16, 2020, PCT No. PCT/EP2020/057015
§ 371(c)(1), (2) Date Sep. 15, 2021,
PCT Pub. No. WO2020/187808, PCT Pub. Date Sep. 24, 2020.
Claims priority of provisional application 62/820,918, filed on Mar. 20, 2019.
Prior Publication US 2022/0181380 A1, Jun. 9, 2022
Int. Cl. H01L 27/146 (2006.01); G01N 23/046 (2018.01); G01T 1/24 (2006.01); G01T 1/20 (2006.01)
CPC H01L 27/14676 (2013.01) [G01N 23/046 (2013.01); G01T 1/24 (2013.01); G01T 1/2018 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A detection layer of a radiation detector, comprising:
a porous silicon membrane, including:
a first side and a second opposing side;
a plurality of pores extending entirely through the porous silicon membrane from the first side to the second opposing side, each including shared walls;
at least one protrusion of silicon protruding out and extending, from the wall on the first side, a distance;
a plurality of radiation sensitive quantum dots in the pores; and
a quantum dot layer disposed on the first side and having a surface and a thickness, wherein the thickness is greater than the distance.