US 11,749,698 B2
Image sensor
Yun Hui Yang, Cheongju-si (KR); and Young Woong Do, Icheon-si (KR)
Assigned to SK HYNIX INC., Icheon-si (KR)
Filed by SK hynix Inc., Icheon-si (KR)
Filed on Jun. 2, 2020, as Appl. No. 16/890,925.
Claims priority of application No. 10-2019-0129420 (KR), filed on Oct. 17, 2019.
Prior Publication US 2021/0118929 A1, Apr. 22, 2021
Int. Cl. H01L 27/146 (2006.01)
CPC H01L 27/14623 (2013.01) [H01L 27/1463 (2013.01); H01L 27/14621 (2013.01); H01L 27/14645 (2013.01)] 21 Claims
OG exemplary drawing
 
1. An image sensor comprising:
a plurality of first grid structures arranged in rows and columns of a pixel array including imaging pixels arranged in rows and columns, the plurality of first grid structures structured to separate the imaging pixels from one another and including a low refractive-index material or air to provide an optical isolation between two adjacent imaging pixels; and
a gap region disposed between two adjacent first grid structures of the plurality of first grid structures and configured to physically isolate the low refractive-index material or the air of the two adjacent first grid structures from each other,
wherein the plurality of first grid structures comprise a first capping layer covering the low refractive-index material or the air.