CPC H01L 27/14623 (2013.01) [H01L 27/1463 (2013.01); H01L 27/14621 (2013.01); H01L 27/14645 (2013.01)] | 21 Claims |
1. An image sensor comprising:
a plurality of first grid structures arranged in rows and columns of a pixel array including imaging pixels arranged in rows and columns, the plurality of first grid structures structured to separate the imaging pixels from one another and including a low refractive-index material or air to provide an optical isolation between two adjacent imaging pixels; and
a gap region disposed between two adjacent first grid structures of the plurality of first grid structures and configured to physically isolate the low refractive-index material or the air of the two adjacent first grid structures from each other,
wherein the plurality of first grid structures comprise a first capping layer covering the low refractive-index material or the air.
|