US 11,749,556 B2
Substrate holder for use in a lithographic apparatus
Niek Jacobus Johannes Roset, Eindhoven (NL); Marcus Martinus Petrus Adrianus Vermeulen, Leende (NL); Simon Karel Ravensbergen, Veldhoven (NL); Mark Constant Johannes Baggen, Eindhoven (NL); Gijs Kramer, Nijmegen (NL); Roger Anton Marie Timmermans, Nederweert (NL); and Frank Pieter Albert Van Den Berkmortel, Deurne (NL)
Assigned to ASML NETHERLANDS B.V., Veldhoven (NL)
Filed by ASML NETHERLANDS B.V., Veldhoven (NL)
Filed on Sep. 22, 2021, as Appl. No. 17/481,978.
Application 17/481,978 is a continuation of application No. 16/650,939, granted, now 11,139,196, previously published as PCT/EP2018/075293, filed on Sep. 19, 2018.
Claims priority of application No. 17196086 (EP), filed on Oct. 12, 2017; and application No. 18163985 (EP), filed on Mar. 26, 2018.
Prior Publication US 2022/0051927 A1, Feb. 17, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. H01L 21/687 (2006.01); G03F 7/20 (2006.01); G03F 7/00 (2006.01)
CPC H01L 21/6875 (2013.01) [G03F 7/707 (2013.01); G03F 7/70341 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A substrate holder for use in a lithographic apparatus and configured to support a substrate, the substrate holder comprising:
a main body having a main body surface;
a plurality of burls projecting from the main body surface, each burl having a distal end surface configured to support the substrate;
a first seal member projecting from the main body surface at an edge region of the main body and having an upper surface arranged to be spaced apart by a first gap from the substrate when the substrate is supported by the plurality of burls, the first seal member located outward, relative to a central portion of main body, of the plurality of burls;
a second seal member projecting from the main body surface at the edge region of the main body and having an upper surface arranged to be spaced apart by a second gap from the substrate when the substrate is supported by the plurality of burls, the second seal member located outward, relative to the central portion of main body, of the first seal member and the plurality of burls, the second seal member arranged to be below the substrate when the substrate is supported by the plurality of burls, and the first gap arranged to be fluidly connected to the second gap when the substrate is supported by the plurality of burls;
at least one extraction opening for the extraction of fluid into the main body from between the main body and the substrate, the at least one extraction opening located between an inner side, relative to the central portion of main body, of the first seal member and an outer side, relative to the central portion of main body, of the second seal member; and
at least one supply opening for the supply of fluid from the main body into a space between the main body and the substrate, the at least one supply opening located between the inner side of the first seal member and the outer side of the second seal member.