US 11,749,551 B2
Chuck for acquiring a warped workpiece
Boaz Nishri, Kibbutz Maagan Michael (IL); Ami Herman, Shimshit (IL); Nir Gurarye, Kfar Tavor (IL); Yaacov Legerbaum, Haifa (IL); Igor Birger, Haifa (IL); Alon Segal, Kiriyat Tivon (IL); Mart Genender, Lod (IL); and Ronen Lautman, Haifa (IL)
Assigned to Core Flow Ltd., Daliyat el-Karmel (IL)
Filed by Core Flow Ltd., Daliyat el-Karmel (IL)
Filed on Feb. 8, 2021, as Appl. No. 17/169,930.
Prior Publication US 2022/0250167 A1, Aug. 11, 2022
Int. Cl. H01L 21/683 (2006.01); B23B 31/30 (2006.01); F25B 9/14 (2006.01)
CPC H01L 21/6838 (2013.01) [B23B 31/307 (2013.01); F25B 9/14 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A chuck comprising:
a chuck surface;
a plurality of cell groups, each cell group comprising:
a plurality of cells distributed over the chuck surface, each of the plurality of cells comprising:
at least one vacuum port, wherein each of the at least one vacuum ports is open to a conduit of a plurality of conduits that are connectable to a suction source that is operable to apply suction to that vacuum port;
and
at least one flow restrictor located within each conduit of the plurality of conduits and characterized by a flow resistance, wherein a flow resistance of each of the at least one flow restrictor in at least one conduit of the plurality of conduits connected to a cell group is less than a flow resistance of a flow restrictor in at least one other conduit of the plurality of conduits connected to another cell group.