US 11,749,548 B2
Transport system, associated movable container and method
Fu-Hsien Li, Taichung (TW); Chi-Feng Tung, Miaoli County (TW); and Hsiang Yin Shen, Hsinchu (TW)
Assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD., Hsinchu (TW)
Filed by TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD., Hsinchu (TW)
Filed on May 14, 2021, as Appl. No. 17/321,184.
Application 17/321,184 is a continuation of application No. 16/390,450, filed on Apr. 22, 2019, granted, now 11,011,402.
Claims priority of provisional application 62/690,631, filed on Jun. 27, 2018.
Prior Publication US 2021/0272831 A1, Sep. 2, 2021
Int. Cl. G06F 7/00 (2006.01); H01L 21/677 (2006.01)
CPC H01L 21/67724 (2013.01) [H01L 21/6773 (2013.01); H01L 21/67709 (2013.01); H01L 21/67733 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A transport system, comprising:
a sensor, wherein the sensor determines a zone, detects a quantity of vehicles in the zone, and sends a quantity information;
a controller, arranged to send an output signal in accordance with the quantity information; and
a power panel, arranged to output a current in accordance with the output signal for driving vehicles in the zone, wherein the current is outputted to a cable extending through the zone.
 
6. A movable container of a semiconductor fabrication facility, comprising:
a power transferring mechanism, comprising a pickup coil arranged to transfer a magnetic field generated from a current on a cable extending along a rail to a driving power to drive the movable container;
a back-up power mechanism, arranged to provide a back-up driving power to drive the movable container when the driving power is insufficient to support the movable container to finish operations of transporting semiconductor wafer in the semiconductor fabrication facility.