CPC H01L 21/67724 (2013.01) [H01L 21/6773 (2013.01); H01L 21/67709 (2013.01); H01L 21/67733 (2013.01)] | 20 Claims |
1. A transport system, comprising:
a sensor, wherein the sensor determines a zone, detects a quantity of vehicles in the zone, and sends a quantity information;
a controller, arranged to send an output signal in accordance with the quantity information; and
a power panel, arranged to output a current in accordance with the output signal for driving vehicles in the zone, wherein the current is outputted to a cable extending through the zone.
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6. A movable container of a semiconductor fabrication facility, comprising:
a power transferring mechanism, comprising a pickup coil arranged to transfer a magnetic field generated from a current on a cable extending along a rail to a driving power to drive the movable container;
a back-up power mechanism, arranged to provide a back-up driving power to drive the movable container when the driving power is insufficient to support the movable container to finish operations of transporting semiconductor wafer in the semiconductor fabrication facility.
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