US 11,749,546 B2
Surface inspection apparatus, processing system, and method of manufacturing article
Kohei Suzuki, Utsunomiya (JP); Shinichiro Hirai, Saitama (JP); and Kenichi Kobayashi, Utsunomiya (JP)
Assigned to CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Sep. 10, 2020, as Appl. No. 17/16,975.
Claims priority of application No. 2019-167488 (JP), filed on Sep. 13, 2019.
Prior Publication US 2021/0082726 A1, Mar. 18, 2021
Int. Cl. H01L 21/67 (2006.01); G01N 21/01 (2006.01); G01N 21/47 (2006.01); G01N 21/95 (2006.01); H01L 21/027 (2006.01); G03F 7/00 (2006.01); H01L 21/66 (2006.01)
CPC H01L 21/67288 (2013.01) [G01N 21/01 (2013.01); G01N 21/47 (2013.01); G01N 21/9505 (2013.01); G03F 7/0002 (2013.01); H01L 21/0271 (2013.01); H01L 22/12 (2013.01); G01N 2201/021 (2013.01); G01N 2201/06113 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A surface inspection apparatus that includes a stage configured to hold a substrate, a light source, a scanning optical system configured to scan light from the light source along a first direction for a plurality of times, a stage scanning mechanism configured to scan the stage in a second direction which intersects with the first direction, and a detector configured to detect scattered light from a surface of the substrate, and inspects the surface of the substrate based on a signal from the detector, wherein
an inspection target region of the substrate is scanned by the light from the light source by an operation of the scanning optical system and the stage scanning mechanism,
chromatic aberration of the scanning optical system is corrected to fall within a predetermined wavelength range,
a fluctuation range of a wavelength of the light generated by the light source is determined based on variation in a total lighting time of the light source in a scanning period of each light scanning operation performed a plurality of times along the first direction by the scanning optical system, and
the fluctuation range falls within the predetermined wavelength range.