CPC H01J 49/167 (2013.01) [G01N 30/7266 (2013.01); H01J 49/0445 (2013.01); H01J 49/0477 (2013.01)] | 13 Claims |
1. An ion source, which ionizes a sample, comprising:
a probe through which a solution containing the sample passes;
a heated gas injection port which injects an inert heating gas that heats a substance injected from the probe;
a heater which increases a temperature of the inert heating gas before the heated gas injection port injects the inert heating gas; and
a gas introduction port which supplies the inert heating gas to the ion source,
wherein the heater includes first and second heater gas inlets that receive the inert heating gas supplied from the gas introduction port to the ion source,
the gas introduction port and the first heater gas inlet are connected by a first pipe extending along an extending direction of the probe,
the gas introduction port and the second heater gas inlet are connected by a second pipe extending along the extending direction of the probe,
the first pipe and the second pipe are configured as pipes having flow paths independent from each other,
the heater is arranged so as to surround an outer surface of the probe along the extending direction of the probe, and
the first pipe and the second pipe are arranged so as to extend along the extending direction of the probe in a space between the gas introduction port and the heater.
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