US 11,749,517 B2
Ion source
Hideki Hasegawa, Tokyo (JP); Masuyuki Sugiyama, Tokyo (JP); and Yuichiro Hashimoto, Tokyo (JP)
Assigned to HITACHI HIGH-TECH CORPORATION, Tokyo (JP)
Appl. No. 17/286,054
Filed by Hitachi High-Tech Corporation, Tokyo (JP)
PCT Filed Oct. 10, 2019, PCT No. PCT/JP2019/039937
§ 371(c)(1), (2) Date Apr. 16, 2021,
PCT Pub. No. WO2020/095611, PCT Pub. Date May 14, 2020.
Claims priority of application No. 2018-210453 (JP), filed on Nov. 8, 2018.
Prior Publication US 2021/0358734 A1, Nov. 18, 2021
Int. Cl. H01J 49/16 (2006.01); H01J 49/04 (2006.01); G01N 30/72 (2006.01)
CPC H01J 49/167 (2013.01) [G01N 30/7266 (2013.01); H01J 49/0445 (2013.01); H01J 49/0477 (2013.01)] 13 Claims
OG exemplary drawing
 
1. An ion source, which ionizes a sample, comprising:
a probe through which a solution containing the sample passes;
a heated gas injection port which injects an inert heating gas that heats a substance injected from the probe;
a heater which increases a temperature of the inert heating gas before the heated gas injection port injects the inert heating gas; and
a gas introduction port which supplies the inert heating gas to the ion source,
wherein the heater includes first and second heater gas inlets that receive the inert heating gas supplied from the gas introduction port to the ion source,
the gas introduction port and the first heater gas inlet are connected by a first pipe extending along an extending direction of the probe,
the gas introduction port and the second heater gas inlet are connected by a second pipe extending along the extending direction of the probe,
the first pipe and the second pipe are configured as pipes having flow paths independent from each other,
the heater is arranged so as to surround an outer surface of the probe along the extending direction of the probe, and
the first pipe and the second pipe are arranged so as to extend along the extending direction of the probe in a space between the gas introduction port and the heater.