US 11,749,502 B2
System and method for pulse modulation of radio frequency power supply and reaction chamber thereof
Gang Wei, Beijing (CN); Jing Wei, Beijing (CN); and Jing Yang, Beijing (CN)
Assigned to BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD., Beijing (CN)
Filed by BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD., Beijing (CN)
Filed on Nov. 11, 2020, as Appl. No. 17/95,278.
Application 17/095,278 is a continuation of application No. PCT/CN2019/083470, filed on Apr. 19, 2019.
Claims priority of application No. 201810474665.4 (CN), filed on May 17, 2018.
Prior Publication US 2021/0066041 A1, Mar. 4, 2021
Int. Cl. H01J 37/32 (2006.01); H05H 1/46 (2006.01)
CPC H01J 37/32155 (2013.01) [H01J 37/32183 (2013.01); H05H 1/46 (2013.01); H05H 2242/26 (2021.05)] 19 Claims
OG exemplary drawing
 
1. A pulse modulation system of a radio frequency (RF) power supply, comprising:
a modulation output circuit configured to modulate a signal from the RF power supply to provide modulation RF signal and output the modulation RF signal in a pulse form to provide a pulse modulation RF signal,
each pulse cycle of the pulse modulation RF signal including a pulse-on phase with pulse-modulated RF signal and a pulse-off phase without pulse-modulated RF signal, and
a power overshoot sub-phase being set in an initial preset time of the pulse-on phase of each pulse cycle; and
a frequency adjustment circuit electrically connected to the modulation output circuit, the frequency adjustment circuit being configured to adjust an RF frequency of the pulse modulation RF signal of the power overshoot sub-phase, according to a preset frequency, to cause a reflected power of the power overshoot sub-phase to satisfy a preset reflected power or to cause a reflected coefficient to satisfy a preset reflected coefficient.