US 11,749,498 B2
System and method for preparation and delivery of biological samples for charged particle analysis
Marcus Straw, Hillsboro, OR (US); Alexander Makarov, Bremen (DE); Josh Gilbert, Hillsboro, OR (US); Aaron Torok, Hillsboro, OR (US); Joseph Christian, Hillsboro, OR (US); Alan Bahm, Hillsboro, OR (US); Kun Liu, Hillsboro, OR (US); Tom Nichols, Hillsboro, OR (US); Jeff Kosmoski, Hillsboro, OR (US); and Dmitry Grinfeld, Hillsboro, OR (US)
Assigned to FEI Company, Hillsboro, OR (US)
Filed by FEI Company, Hillsboro, OR (US)
Filed on Dec. 22, 2021, as Appl. No. 17/559,553.
Application 17/559,553 is a continuation of application No. 16/914,924, filed on Jun. 29, 2020, granted, now 11,217,425.
Prior Publication US 2022/0115205 A1, Apr. 14, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. H01J 37/295 (2006.01); H01J 37/20 (2006.01); H01J 49/42 (2006.01)
CPC H01J 37/295 (2013.01) [H01J 37/20 (2013.01); H01J 49/4215 (2013.01)] 26 Claims
OG exemplary drawing
 
1. An apparatus comprising:
an ion filter coupled to select a sample ion from an ionized sample supply;
an energy reduction cell coupled to receive the selected sample ion and reduce a kinetic energy of the sample ion;
a substrate positioned to receive the sample, the substrate arranged on a substrate holder, wherein the substrate holder is moveably coupled to translation track to move the substrate from a deposition location to an analysis location, and wherein the substrate is in the deposition location when receiving the sample;
an ion transport module coupled to receive the sample ion from the energy reduction cell and transport the sample ion to the substrate; and
an imaging system arranged to image the sample located on the substrate, wherein the substrate is positioned in the analysis location by the substrate holder prior to imaging, the imaging system including:
an emitter coupled to direct a charged particle beam toward the sample; and
a detector arranged to detect charged particles emitted from or transmitted through the sample.