CPC H01J 37/28 (2013.01) [H01J 37/265 (2013.01); H01J 37/3244 (2013.01); H01J 37/3447 (2013.01); H01J 2237/31749 (2013.01)] | 12 Claims |
1. An apparatus comprising:
an SEM column and a focused ion beam (FIB) column;
a gas injection nozzle coupled to a translation device, the translation device configured to insert the gas injection nozzle into a processing position; and
a shutter coupled to the gas injection nozzle and arranged to be disposed between a sample and the SEM column when the gas injection nozzle is inserted into the processing position, wherein the shutter is arranged to protect components of the SEM column during sample processing with the FIB column.
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