US 11,749,492 B2
Mechanically-stable electron source
Kun Liu, Portland, OR (US); Gregory A. Schwind, Portland, OR (US); and Alan S. Bahm, Hillsboro, OR (US)
Assigned to FEI Company, Hillsboro, OR (US)
Filed by FEI Company, Hillsboro, OR (US)
Filed on Mar. 14, 2022, as Appl. No. 17/654,759.
Claims priority of provisional application 63/160,207, filed on Mar. 12, 2021.
Prior Publication US 2022/0293387 A1, Sep. 15, 2022
Int. Cl. H01J 37/073 (2006.01); H01J 9/02 (2006.01)
CPC H01J 37/073 (2013.01) [H01J 9/025 (2013.01); H01J 2237/06341 (2013.01)] 26 Claims
OG exemplary drawing
 
1. An electron source, comprising:
an insulating base;
a pair of conductive terminals exposed from a first surface of the insulating base;
an insulating support member extending from the first surface of the insulating base;
a drift isolation member disposed at an end of the insulating support member remote from the insulating base;
an emitter-cathode coupled to the drift isolation member; and
one or more heating elements coupled to the conductive terminals and the drift isolation member.