CPC G06T 7/001 (2013.01) [G01J 1/42 (2013.01); G01J 1/44 (2013.01); G01N 21/958 (2013.01); G02B 27/0172 (2013.01); G06T 7/80 (2017.01); G06T 7/90 (2017.01); H04N 23/56 (2023.01); H04N 23/74 (2023.01); H04N 23/90 (2023.01); G01J 2001/4247 (2013.01); G01N 2021/9583 (2013.01); G02B 2027/014 (2013.01); G02B 2027/0112 (2013.01); G02B 2027/0118 (2013.01); G02B 2027/0138 (2013.01); G06T 2207/10024 (2013.01); G06T 2207/30108 (2013.01)] | 17 Claims |
1. An optical device metrology system, comprising:
a stage configured to move a tray along a stage path;
a first light engine mounted above the stage path and configured to direct upper light beams toward the stage path;
a second light engine mounted below the stage path and configured to direct lower light beams toward the stage path;
a detector mounted above the stage path and configured to receive projected light beams projected from the stage path; and
a controller in communication with the stage, the first light engine, the second light engine, and the detector, the controller comprising instructions that, when executed, cause:
the stage to position an optical device above the second light engine to align an output coupler of the optical device between the light engine and the detector;
the second light engine to direct first light beams from the second light engine and toward the output coupler of the optical device;
the detector to capture a plurality of first images of the first light beams that project from the optical device as first projected light beams;
the stage to position the optical device away from the second light engine to misalign the output coupler of the optical device from the second light engine;
the second light engine to direct second light beams from the second light engine and toward the detector;
the detector to capture a plurality of second images of the second light beams; and
comparing of the plurality of second images with the plurality of first images to determine a see-through transmittance metric of the optical device.
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