US 11,748,875 B2
See-through metrology systems, apparatus, and methods for optical devices
Yangyang Sun, San Jose, CA (US); Jinxin Fu, Fremont, CA (US); Kazuya Daito, Milpitas, CA (US); and Ludovic Godet, Sunnyvale, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Oct. 4, 2021, as Appl. No. 17/492,826.
Claims priority of provisional application 63/092,421, filed on Oct. 15, 2020.
Prior Publication US 2022/0121030 A1, Apr. 21, 2022
Int. Cl. G06T 7/00 (2017.01); G06T 7/90 (2017.01); G06T 7/80 (2017.01); G01J 1/42 (2006.01); G02B 27/01 (2006.01); G01J 1/44 (2006.01); G01N 21/958 (2006.01); H04N 23/56 (2023.01); H04N 23/74 (2023.01); H04N 23/90 (2023.01)
CPC G06T 7/001 (2013.01) [G01J 1/42 (2013.01); G01J 1/44 (2013.01); G01N 21/958 (2013.01); G02B 27/0172 (2013.01); G06T 7/80 (2017.01); G06T 7/90 (2017.01); H04N 23/56 (2023.01); H04N 23/74 (2023.01); H04N 23/90 (2023.01); G01J 2001/4247 (2013.01); G01N 2021/9583 (2013.01); G02B 2027/014 (2013.01); G02B 2027/0112 (2013.01); G02B 2027/0118 (2013.01); G02B 2027/0138 (2013.01); G06T 2207/10024 (2013.01); G06T 2207/30108 (2013.01)] 17 Claims
OG exemplary drawing
 
1. An optical device metrology system, comprising:
a stage configured to move a tray along a stage path;
a first light engine mounted above the stage path and configured to direct upper light beams toward the stage path;
a second light engine mounted below the stage path and configured to direct lower light beams toward the stage path;
a detector mounted above the stage path and configured to receive projected light beams projected from the stage path; and
a controller in communication with the stage, the first light engine, the second light engine, and the detector, the controller comprising instructions that, when executed, cause:
the stage to position an optical device above the second light engine to align an output coupler of the optical device between the light engine and the detector;
the second light engine to direct first light beams from the second light engine and toward the output coupler of the optical device;
the detector to capture a plurality of first images of the first light beams that project from the optical device as first projected light beams;
the stage to position the optical device away from the second light engine to misalign the output coupler of the optical device from the second light engine;
the second light engine to direct second light beams from the second light engine and toward the detector;
the detector to capture a plurality of second images of the second light beams; and
comparing of the plurality of second images with the plurality of first images to determine a see-through transmittance metric of the optical device.