CPC G06T 7/001 (2013.01) [G01N 21/8806 (2013.01); G01N 21/8851 (2013.01); G06T 3/4007 (2013.01); G01N 2021/8861 (2013.01); G01N 2021/8887 (2013.01); G06T 2207/30148 (2013.01)] | 25 Claims |
1. A system configured for setting up inspection of a specimen, comprising:
an inspection subsystem configured to generate output responsive to energy detected from a specimen; and
one or more computer subsystems configured for:
acquiring a reference image of the specimen;
modifying the reference image to fit the reference image to a design grid thereby generating a golden grid image; and
storing the golden grid image for use in inspection of the specimen, wherein the inspection comprises aligning a test image of the specimen generated from the output of the inspection subsystem to the golden grid image.
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