US 11,748,872 B2
Setting up inspection of a specimen
Hong Chen, San Ramon, CA (US); Bjorn Brauer, Beaverton, OR (US); Abdurrahman Sezginer, Monte Sereno, CA (US); Sangbong Park, Union City, CA (US); Ge Cong, Pleasanton, CA (US); and Xiaochun Li, San Jose, CA (US)
Assigned to KLA Corp., Milpitas, CA (US)
Filed by KLA Corporation, Milpitas, CA (US)
Filed on Feb. 2, 2021, as Appl. No. 17/165,826.
Claims priority of provisional application 63/072,939, filed on Aug. 31, 2020.
Prior Publication US 2022/0067898 A1, Mar. 3, 2022
Int. Cl. G06T 7/00 (2017.01); G01N 21/88 (2006.01); G06T 3/40 (2006.01)
CPC G06T 7/001 (2013.01) [G01N 21/8806 (2013.01); G01N 21/8851 (2013.01); G06T 3/4007 (2013.01); G01N 2021/8861 (2013.01); G01N 2021/8887 (2013.01); G06T 2207/30148 (2013.01)] 25 Claims
OG exemplary drawing
 
1. A system configured for setting up inspection of a specimen, comprising:
an inspection subsystem configured to generate output responsive to energy detected from a specimen; and
one or more computer subsystems configured for:
acquiring a reference image of the specimen;
modifying the reference image to fit the reference image to a design grid thereby generating a golden grid image; and
storing the golden grid image for use in inspection of the specimen, wherein the inspection comprises aligning a test image of the specimen generated from the output of the inspection subsystem to the golden grid image.