CPC G06F 30/398 (2020.01) [G03F 1/36 (2013.01)] | 20 Claims |
1. A method for performing mask rule checks for a mask representation of an electronic circuit, the method comprising:
receiving the mask representation of the electronic circuit, the mask representation comprising a plurality of geometric shapes;
determining a medial axis for the plurality of geometric shapes, wherein a portion of the medial axis includes points that are equidistant from a pair of geometric shapes; and
for each point from a set of points on the portion of the medial axis:
determining a distance between the point and each geometric shape from the pair of geometric shapes;
determining whether the distance between the point and each of the pair of geometric shapes is less than a threshold distance; and
responsive to determining that the distance between the point and each of the pair of geometric shapes is less than the threshold distance, reporting the pair of geometric shapes as a violation of a mask rule.
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