CPC G05B 19/4097 (2013.01) [G03F 1/24 (2013.01); G03F 1/36 (2013.01); G03F 1/70 (2013.01); G06F 30/392 (2020.01); G05B 2219/35012 (2013.01); G05B 2219/45027 (2013.01); G05B 2219/45028 (2013.01); G05B 2219/45031 (2013.01); G06F 30/3308 (2020.01); G06F 30/367 (2020.01); G06F 2111/20 (2020.01); G06F 2119/18 (2020.01); G21K 5/00 (2013.01)] | 20 Claims |
1. A system comprising:
a manager machine interacting with a plurality of worker machines,
wherein the manager machine is configured to:
receive an IC design layout;
partition the IC design layout into a plurality of tiles;
assign the plurality of tiles to the plurality of worker machines; and
wherein the plurality of worker machines interact with the manager machine and are configured to synchronize image values from the plurality of tiles;
wherein the manager machine is further configured to:
generate a modified IC design layout by combining final synchronized image values from the plurality of worker machines; and
provide the modified IC design layout for fabricating a mask.
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