	US 11,747,724 B2
	Organically modified metal oxide nanoparticles, organically modified metal oxide nanoparticles-containing solution, organically modified metal oxide nanoparticles-containing resist composition, and resist pattern forming method
Kiwamu Sue, Tsukuba (JP); Sho Kataoka, Tsukuba (JP); Yusuke Yoshigoe, Tsukuba (JP); Takatoshi Inari, Kawasaki (JP); Masatoshi Arai, Kawasaki (JP); Takaya Maehashi, Kawasaki (JP); Yoshitaka Komuro, Kawasaki (JP); and Daisuke Kawana, Kawasaki (JP)
Assigned to TOKYO OHKA KOGYO CO., LTD., Kawasaki (JP); and NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY, Tokyo (JP)
Filed by NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY, Tokyo (JP)
Filed on Dec. 22, 2020, as Appl. No. 17/131,094.
Claims priority of application No. 2019-233068 (JP), filed on Dec. 24, 2019; and application No. 2020-207558 (JP), filed on Dec. 15, 2020.
Prior Publication US 2021/0191261 A1, Jun. 24, 2021
Int. Cl. G03F 7/004 (2006.01); C07F 7/00 (2006.01)

CPC G03F 7/0042 (2013.01) [C07F 7/003 (2013.01)]

8 Claims

1. Organically modified metal oxide nanoparticles comprising:

two or more cores including a plurality of metal atoms and a plurality of oxygen atoms covalently bonded to the plurality of metal atoms;

a first modifying group (A1) that is a ligand coordinated to each of the cores and selected from the group consisting of a carboxylic acid carboxylate, a sulfonic acid sulfonate, and a phosphonic acid phosphonate; and

a second modifying group (A2) that is coordinated to each of the cores and is at least one selected from the group consisting of a ligand having a structure different from that of the first modifying group (A1) and an inorganic anion,

wherein the organically modified metal oxide nanoparticle has a structure in which the cores are crosslinked through a coordinate bond by at least the first modifying group (A1), and

wherein the organically modified metal oxide nanoparticle is represented by Formula (m01):

C01-L01-C02 (m01)

wherein C01 is M₆O₄(OH)₄[X_aY_b], where 0≤a≤10 and 1≤b≤11;C02 is M₆O₄(OH)₄[X_cY_d], where 0≤c≤10 and 1≤d≤11; and L01 is Xw, where w=24−(a+b+c+d) and 2≤w≤12,

provided that M is the metal atom, which is a metal atom belonging to Group 4 elements, X is the first modifying group (A1), and Y is the second modifying group (A2).