CPC G02B 26/127 (2013.01) [G01S 7/4817 (2013.01)] | 18 Claims |
1. A beam scanning device comprising:
a substrate: and
a spatial light modulator which is provided on the substrate and is configured to modulate a phase of a light for a corresponding pixel of a plurality of pixels;
wherein the spatial light modulator comprises a first reflector, a second reflector, and a cavity provided between the first reflector and the second reflector,
wherein the first reflector comprises a distributed Bragg reflector and the second reflector is a grating reflector which comprises a first layer which is n-doped, a second layer which is provided on the first layer and is intrinsic, and a third layer which is provided on the second layer and is p-doped or n-doped, and
a first voltage is applied to the first layer and a second voltage is applied to the third layer.
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