US 11,747,614 B2
Beam scanning device and system including the same comprising a spatial light modulator with a cavity provided between a first and a second reflector
Junghyun Park, Seoul (KR); Sunil Kim, Hwaseong-si (KR); Duhyun Lee, Yongin-si (KR); and Byunggil Jeong, Anyang-si (KR)
Assigned to SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed by SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed on Jan. 13, 2022, as Appl. No. 17/575,189.
Application 17/575,189 is a continuation in part of application No. 16/416,972, filed on May 20, 2019, granted, now 11,256,081.
Claims priority of application No. 10-2018-0159116 (KR), filed on Dec. 11, 2018.
Prior Publication US 2022/0137402 A1, May 5, 2022
Int. Cl. G02F 1/13 (2006.01); G02B 26/12 (2006.01); G01S 7/481 (2006.01)
CPC G02B 26/127 (2013.01) [G01S 7/4817 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A beam scanning device comprising:
a substrate: and
a spatial light modulator which is provided on the substrate and is configured to modulate a phase of a light for a corresponding pixel of a plurality of pixels;
wherein the spatial light modulator comprises a first reflector, a second reflector, and a cavity provided between the first reflector and the second reflector,
wherein the first reflector comprises a distributed Bragg reflector and the second reflector is a grating reflector which comprises a first layer which is n-doped, a second layer which is provided on the first layer and is intrinsic, and a third layer which is provided on the second layer and is p-doped or n-doped, and
a first voltage is applied to the first layer and a second voltage is applied to the third layer.