US 11,747,612 B2
Instrument for moving and positioning of optical elements with nanometric mechanical stabiling and resolution in synchrotron light source beamlines
Renan Ramalho Geraldes, Campinas (BR); Ricardo Malagodi Caliari, Campinas (BR); and Marlon Saveri Silva, Campinas (BR)
Assigned to Centro Nacional De Pesquisa Em Energia E Materials, Campinas (BR)
Filed by CENTRO NACIONAL DE PESQUISA EM ENERGIA E MATERIAIS, Campinas (BR)
Filed on Oct. 27, 2021, as Appl. No. 17/512,458.
Application 17/512,458 is a continuation of application No. 16/331,925, abandoned, previously published as PCT/BR2017/050262, filed on Sep. 6, 2017.
Claims priority of application No. 102016020900-5 (BR), filed on Sep. 9, 2016; and application No. 102017019178-8 (BR), filed on Sep. 6, 2017.
Prior Publication US 2022/0075179 A1, Mar. 10, 2022
Int. Cl. G02B 26/00 (2006.01); G02B 26/10 (2006.01); G21K 1/06 (2006.01); G02B 7/00 (2021.01); G02B 7/18 (2021.01); H02K 41/035 (2006.01)
CPC G02B 26/101 (2013.01) [G02B 7/005 (2013.01); G21K 1/06 (2013.01); G02B 7/18 (2013.01); H02K 41/0354 (2013.01)] 11 Claims
OG exemplary drawing
 
1. An instrument for moving and positioning of optical elements with nanometric mechanical stability and resolution in synchrotron beamlines, comprising:
a reference structure;
a mounting structure;
one or more optical elements mounted to the mounting structure;
one or more position actuators configured to move the mounting structure in relation to the reference structure;
at least one reaction mass, attached in a movable manner to the mounting structure, configured to receive a reaction force resulting from the positioning of the mounting structure in relation to the reference structure, through an actuation of the position actuators;
one or more positioning sensors configured to measure a position of the mounting structure in relation to the reference structure;
a main feedback loop including the positioning sensors and the position actuators, configured to use information from the positioning sensors to control the position of the mounting structure through the position actuators,
said instrument further comprising:
a complementary mounting structure rigidly mounted to the reference structure such that the positioning sensors are configured to measure the position of the mounting structure in relation to the complementary mounting structure instead of to the reference structure, and the position actuators are configured to move the mounting structure in relation to the complementary mounting structure instead of to the reference structure;
a complementary optical element rigidly mounted to the complementary mounting structure;
a complementary structure attached in a movable manner to the reference structure;
one or more complementary position actuators configured to move the complementary structure in relation to the reference structure;
a first set of elastic components by which the mounting structure is attached in a movable manner to the complementary structure, thereby allowing relative translation or rotation movements along or about one or more axes;
a second set of elastic components by which the reaction mass is attached in a movable manner to the complementary structure, thereby allowing relative translation and rotation movements along or about one or more axes; and
a third set of elastic components by which the complementary structure is connected to the reference structure.