CPC G02B 26/101 (2013.01) [G01S 17/894 (2020.01); G02B 26/0858 (2013.01)] | 36 Claims |
1. An optical module, comprising:
a substrate;
an optical detector carried by the substrate;
a laser emitter carried by the substrate;
a support structure carried by the substrate; and
an optical layer comprising:
a fixed portion carried by the support structure;
a movable portion affixed between opposite sides of the fixed portion by a spring structure;
a lens system carried by the movable portion, the lens system including an objective lens portion and a beam shaping lens portion, the objective lens portion being positioned such that it overlies the optical detector, the beam shaping lens portion being positioned such that it overlies the laser emitter; and
a MEMS actuator for in-plane movement of the movable portion with respect to the fixed portion.
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