US 11,747,611 B2
Compact line scan mems time of flight system with actuated lens
Christopher Townsend, Edinburgh (GB); and Roberto Carminati, Piancogno (IT)
Assigned to STMicroelectronics (Research & Development) Limited, Marlow (GB); and STMicroelectronics S.r.l., Agrate Brianza (IT)
Filed by STMicroelectronics (Research & Development) Limited, Marlow (GB); and STMicroelectronics S.r.l., Agrate Brianza (IT)
Filed on Dec. 16, 2020, as Appl. No. 17/124,027.
Prior Publication US 2022/0187593 A1, Jun. 16, 2022
Int. Cl. G02B 26/10 (2006.01); G01S 17/894 (2020.01); G02B 26/08 (2006.01)
CPC G02B 26/101 (2013.01) [G01S 17/894 (2020.01); G02B 26/0858 (2013.01)] 36 Claims
OG exemplary drawing
 
1. An optical module, comprising:
a substrate;
an optical detector carried by the substrate;
a laser emitter carried by the substrate;
a support structure carried by the substrate; and
an optical layer comprising:
a fixed portion carried by the support structure;
a movable portion affixed between opposite sides of the fixed portion by a spring structure;
a lens system carried by the movable portion, the lens system including an objective lens portion and a beam shaping lens portion, the objective lens portion being positioned such that it overlies the optical detector, the beam shaping lens portion being positioned such that it overlies the laser emitter; and
a MEMS actuator for in-plane movement of the movable portion with respect to the fixed portion.